Title :
The superlattice barrier capacitor: A structure for the investigation of heterojunction interfaces
Author :
Drummond, T.J. ; Kopp, W. ; Fischer, R. ; Morkoç, H.
Author_Institution :
University of Illinois, Urbana, IL
fDate :
5/1/1984 12:00:00 AM
Abstract :
A symmetric n- GaAs/AlAs-GaAs superlattice/n- GaAs structure has been fabricated and electrical measurements made between 300 and 77 K. At 238 K and below, the C-V characteristics were clearly symmetric, in good agreement with theory. Such a structure can be used as a sensitive probe of the interface defects at the "normal" and "inverted" heterojunction interfaces associated with the barrier. Furthermore, the highly nonlinear C-V characteristic of this symmetric semiconductor capacitor near-zero bias may have unique applications.
Keywords :
Capacitors; Doping; Epitaxial layers; Gallium arsenide; HEMTs; Heterojunctions; MODFETs; Probes; Substrates; Superlattices;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25862