DocumentCode
1096400
Title
j-MOS: A versatile power field-effect transistor
Author
MacIver, B.A. ; Jain, K.C.
Author_Institution
General Motors Research Laboratories, Warren, MI
Volume
5
Issue
5
fYear
1984
fDate
5/1/1984 12:00:00 AM
Firstpage
154
Lastpage
156
Abstract
A novel field-effect transistor (FET) structure that is attractive for power control applications is proposed and demonstrated. It combines MOSFET structural features and junction FET function in a simple, self-aligned structure that we refer to as j-MOS. Lateral j-MOS transistors were fabricated in silicon-on-sapphire (SOS) with on-resistance as low as 2.5 Ω in 1 cm of channel width. From this result, we project that a vertical version of j-MOS can be fabricated in silicon-on-buried insulator (SOI) with a specific on-resistance ≤ 1 m Ω.cm2, approximately a factor of two improvement over current power FET technology.
Keywords
Associate members; FETs; Fabrication; MOSFET circuits; Power transistors; Silicon on insulator technology; Substrates; Testing; Thin film transistors; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25867
Filename
1484243
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