Title :
Reply to "Comments on \´determining specific contact resistivity from contact end resistance measurements\´"
Author :
Chern, J. ; Oldham, W.G.
Author_Institution :
University of California, Berkeley, CA
Keywords :
Conductivity; Contact resistance; Electric resistance; Electrical resistance measurement; Electron devices; Etching; Power transmission lines; Proximity effect; Silicon; Surface resistance;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25942
