DocumentCode
1097203
Title
Reply to "Comments on \´determining specific contact resistivity from contact end resistance measurements\´"
Author
Chern, J. ; Oldham, W.G.
Author_Institution
University of California, Berkeley, CA
Volume
5
Issue
9
fYear
1984
Firstpage
349
Lastpage
349
Keywords
Conductivity; Contact resistance; Electric resistance; Electrical resistance measurement; Electron devices; Etching; Power transmission lines; Proximity effect; Silicon; Surface resistance;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25942
Filename
1484318
Link To Document