• DocumentCode
    1097368
  • Title

    A low-power programming technique for polysilicon fuses

  • Author

    Lu, C.Y. ; Lu, N.C.-C. ; Shih, C.-C.

  • Author_Institution
    AT&T Bell Laboratories, Reading, PA
  • Volume
    5
  • Issue
    10
  • fYear
    1984
  • fDate
    10/1/1984 12:00:00 AM
  • Firstpage
    392
  • Lastpage
    394
  • Abstract
    A new programming technique for polysilicon resistor fuses using low input electrical power has been demonstrated. In contrast to the conventional technique which programs fuses in the air at atmospheric pressure, the new technique is to program fuses in a low-pressure gas ambient. Removal of the entire passivation layers over the fuses is not necessary thus avoiding the contamination problem.
  • Keywords
    Atmosphere; Contamination; Degradation; Driver circuits; Fuses; Glass; Passivation; Resistors; Silicon; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1984.25960
  • Filename
    1484336
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1097368