DocumentCode
1097581
Title
An analytical model for the channel electric field in MOSFET´s with graded-drain structures
Author
Terrill, K.W. ; Hu, C. ; Ko, P.K.
Author_Institution
University of California, Berkeley, CA
Volume
5
Issue
11
fYear
1984
fDate
11/1/1984 12:00:00 AM
Firstpage
440
Lastpage
442
Abstract
A simple analytical model for the lateral channel electric field in the drain region of MOSFET´s with graded-drain or lightly doped drain structures is presented. The model´s results agree well with two-dimensional simulations of the electric field in the drain region. Due to its simplicity, this model gives a better understanding of the mechanisms involved in reducing the electric field in the lightly doped region. Results show the impact of the length and doping concentration, assumed to be Gaussian, of the lightly doped region on the electric field. Effects of the oxide thickness and junction depth are also accounted for. In each case, there is an optimum doping concentration that minimizes the peak electric field.
Keywords
Analytical models; Channel bank filters; Degradation; Doping; IEL; MOS devices; MOSFET circuits; Poisson equations; Semiconductor process modeling; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25980
Filename
1484356
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