Title :
GaAs/AlGaAs MODFET´s grown on
Author :
Fischer, R. ; Klem, J. ; Henderson, T. ; Masselink, W.T. ; Kopp, W. ; Morkoc, H. ; Morkoç, H.
Author_Institution :
University of Illinois, Urbana-Champaign, IL
fDate :
11/1/1984 12:00:00 AM
Abstract :
GaAs/AlGaAs MODFET´s have been grown on
Keywords :
Epitaxial growth; Etching; Gallium arsenide; HEMTs; Heterojunctions; MODFETs; Molecular beam epitaxial growth; Substrates; Superlattices; Temperature;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1984.25986
