DocumentCode
1097648
Title
GaAs/AlGaAs MODFET´s grown on
Author
Fischer, R. ; Klem, J. ; Henderson, T. ; Masselink, W.T. ; Kopp, W. ; Morkoc, H. ; Morkoç, H.
Author_Institution
University of Illinois, Urbana-Champaign, IL
Volume
5
Issue
11
fYear
1984
fDate
11/1/1984 12:00:00 AM
Firstpage
456
Lastpage
457
Abstract
GaAs/AlGaAs MODFET´s have been grown on
Keywords
Epitaxial growth; Etching; Gallium arsenide; HEMTs; Heterojunctions; MODFETs; Molecular beam epitaxial growth; Substrates; Superlattices; Temperature;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1984.25986
Filename
1484362
Link To Document