Special Issue on Plasma-Based Surface Modification and Treatment Technologies

The 12 papers in this special issue focus on plasma-based surface modification and treatment technologies. The areas covered include physics and modeling of plasma-surface interactions; plasma instrumentation such as plasma sources and power modulators; plasma-based deposition techniques; plasma immersion ion-implantation and hybrid implantation-deposition technologies; medical, biological, metallurgical, aerospace, and environmental applications; plasma surface treatment of insulators and large industrial components; characterization of plasma-treated surfaces; fabrication of novel microelectronic and photonic structures and devices using plasma-based techniques; as well as plasma-based doping of semiconductors.