DocumentCode :
1099227
Title :
Conditions for Image-Based Identification of SPM-Nanopositioner Dynamics
Author :
Clayton, Garrett M. ; Devasia, Santosh
Author_Institution :
Dept. of Mech. Eng., Villanova Univ., Villanova, PA, USA
Volume :
14
Issue :
4
fYear :
2009
Firstpage :
405
Lastpage :
413
Abstract :
Rather than using external sensors, images of standard calibration samples can be used to model and correct positioning errors caused by dynamics effects in scanning probe microscopes (SPMs). The main contribution of this study is the development of conditions, on the calibration sample and the scan trajectory, that allow for the image based identification of SPM nanopositioner dynamics. The choice of and tradeoff between calibration sample and scan trajectory properties are discussed in the context of a scanning tunneling microscope (STM) example.
Keywords :
calibration; electron microscopes; image recognition; nanopositioning; scanning probe microscopy; scanning tunnelling microscopy; SPM nanopositioner dynamics; calibration images; calibration sample; positioning error correction; scan trajectory; scanning probe microscopes; scanning tunneling microscope; Atomic force microscopy; control systems; nanotechnology; piezoelectric transducers; scanning probe microscope (SPM); scanning tunneling microscope (STM);
fLanguage :
English
Journal_Title :
Mechatronics, IEEE/ASME Transactions on
Publisher :
ieee
ISSN :
1083-4435
Type :
jour
DOI :
10.1109/TMECH.2009.2023987
Filename :
5109698
Link To Document :
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