• DocumentCode
    1099235
  • Title

    Novel split-gate MOSFET

  • Author

    Akiya, M. ; Nakashima, Sadao

  • Author_Institution
    Nippon Telegraph and Telephone Public Corporation, Atsugi-shi, Kanagawa, Japan
  • Volume
    32
  • Issue
    3
  • fYear
    1985
  • fDate
    3/1/1985 12:00:00 AM
  • Firstpage
    589
  • Lastpage
    593
  • Abstract
    A new type of split-gate MOSFET (SG-MOSFET) is described that employs a complementary poly-Si-gate buried-channel MOS process. In this configuration, complementary SG-MOS´s provide higher transconductance and a one-order smaller magnitude of channel-length modulation than with conventional buried-channel MOSFET´s. Moreover, there is no requirement for additional mask steps. Four-times higher packing density was also obtained in a differential amplifier application.
  • Keywords
    Boron; CMOS technology; Differential amplifiers; Fabrication; Filters; MOSFET circuits; Split gate flash memory cells; Telegraphy; Telephony; Transconductance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.21982
  • Filename
    1484728