Title :
Quartz versus PBN—The effect of crucible type on undoped LEC GaAS
Author :
Chang, James S.C. ; McCall, David E. ; Wong, Edward H.
Author_Institution :
Hewlett-Packard Company, Santa Rosa, CA
fDate :
6/1/1985 12:00:00 AM
Abstract :
Undoped semi-insulating GaAs crystals were grown in a low pressure LEC system using quartz and pyrolytic boron nitride (PBN) crucibles. Crystals grown in PBN crucibles are consistently semi-insulating from the seed end to the tail end. Crystals grown in quartz crucibles have lower Hall mobility. Other properties such as dislocation etch-pit of conductive material beginning from the seed end of the crystal, and have lower Hall mobility. Other properties such as dislocation etch-put density, implant profile, and thermal conversion characteristics of the two types of crystal are about the same.
Keywords :
Automatic control; Boron; Crystalline materials; Crystals; Etching; Gallium arsenide; Hall effect; Ion implantation; Shafts; Valves;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1985.22084