• DocumentCode
    1100588
  • Title

    A polyimide-based capacitive humidity sensor

  • Author

    Schubert, Peter J. ; Nevin, Joseph H.

  • Author_Institution
    Delco Electronics, Kokomo, IN
  • Volume
    32
  • Issue
    7
  • fYear
    1985
  • fDate
    7/1/1985 12:00:00 AM
  • Firstpage
    1220
  • Lastpage
    1223
  • Abstract
    The design of a relative humidity sensor is studied in which the principle of operation is based on the change of dielectric constant of a thin film of polyimide. The design of the sensor is established in such a way that it would be suitable for an integrated-circuit type of fabrication. The studies have shown that the experimental data are described well by the use of the Looyenga equation for dielectric constant behavior coupled with the Dubinin equation to describe the absorption as a function of relative humidity.
  • Keywords
    Absorption; Capacitance; Capacitive sensors; Electrodes; Equations; Geometry; Humidity; Polyimides; Temperature; Transducers;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.22104
  • Filename
    1484850
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1100588