• DocumentCode
    1100607
  • Title

    A MoSi2Schottky diode for bipolar LSI´s

  • Author

    Yamamoto, Yousuke ; Miyanaga, Hiroshi ; Amazawa, Takao ; Sakai, Tadashi ; Sakai, Tetsushi

  • Author_Institution
    Nippon Telegraph and Telephone Public Corporation, Kanagawa, Japan
  • Volume
    32
  • Issue
    7
  • fYear
    1985
  • fDate
    7/1/1985 12:00:00 AM
  • Firstpage
    1231
  • Lastpage
    1239
  • Abstract
    Fabrication and characterization of a molybdenum silicide Schottky diode have been investigated for its application to large-scale bipolar logic LSI´s using a Schottky TTL. The diode consists of a silicon
  • Keywords
    Aluminum; Clamps; Electrodes; Fabrication; Heat treatment; Large scale integration; Schottky diodes; Semiconductor diodes; Silicides; Voltage control;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.22106
  • Filename
    1484852
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1100607