Title :
A MoSi2Schottky diode for bipolar LSI´s
Author :
Yamamoto, Yousuke ; Miyanaga, Hiroshi ; Amazawa, Takao ; Sakai, Tadashi ; Sakai, Tetsushi
Author_Institution :
Nippon Telegraph and Telephone Public Corporation, Kanagawa, Japan
fDate :
7/1/1985 12:00:00 AM
Abstract :
Fabrication and characterization of a molybdenum silicide Schottky diode have been investigated for its application to large-scale bipolar logic LSI´s using a Schottky TTL. The diode consists of a silicon
Keywords :
Aluminum; Clamps; Electrodes; Fabrication; Heat treatment; Large scale integration; Schottky diodes; Semiconductor diodes; Silicides; Voltage control;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1985.22106