• DocumentCode
    1101536
  • Title

    Measurement of the effective recombination velocity of semiconductor high-low transitions

  • Author

    Bellone, Salvatore ; Caruso, Antonio ; Vitale, Gianfranco

  • Author_Institution
    University of Naples, Naples, Italy
  • Volume
    32
  • Issue
    9
  • fYear
    1985
  • fDate
    9/1/1985 12:00:00 AM
  • Firstpage
    1771
  • Lastpage
    1775
  • Abstract
    A new method for the measurement of the effective recombination velocity (ERV) of high-low transitions is proposed. The method is based upon a test structure that is easily incorporated in the standard process of bipolar devices. The ERV is directly obtained out of simple dc measurements without any critical parameter involved. The ERV can be measured over a wide range of injection levels and its two main components, namely the one due to the high-doped layer and the one due to the retarding region of the transition, can be easily separated from each other.
  • Keywords
    Circuit testing; Current measurement; Doping profiles; Fabrication; Helium; Radiative recombination; Semiconductor diodes; Semiconductor process modeling; Thickness measurement; Velocity measurement;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.22195
  • Filename
    1484941