DocumentCode
1101536
Title
Measurement of the effective recombination velocity of semiconductor high-low transitions
Author
Bellone, Salvatore ; Caruso, Antonio ; Vitale, Gianfranco
Author_Institution
University of Naples, Naples, Italy
Volume
32
Issue
9
fYear
1985
fDate
9/1/1985 12:00:00 AM
Firstpage
1771
Lastpage
1775
Abstract
A new method for the measurement of the effective recombination velocity (ERV) of high-low transitions is proposed. The method is based upon a test structure that is easily incorporated in the standard process of bipolar devices. The ERV is directly obtained out of simple dc measurements without any critical parameter involved. The ERV can be measured over a wide range of injection levels and its two main components, namely the one due to the high-doped layer and the one due to the retarding region of the transition, can be easily separated from each other.
Keywords
Circuit testing; Current measurement; Doping profiles; Fabrication; Helium; Radiative recombination; Semiconductor diodes; Semiconductor process modeling; Thickness measurement; Velocity measurement;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1985.22195
Filename
1484941
Link To Document