Title :
Preparation of thin film high temperature superconductors
Author :
Xi, X.X. ; Venkatesan, T. ; Li, Q. ; Wu, X.D. ; Inam, A. ; Chang, C.C. ; Ramesh, R. ; Hwang, D.M. ; Ravi, T.S. ; Findikoglu, A. ; Hemmick, D. ; Etemad, S. ; Martinez, J.A. ; Wilkens, B.
Author_Institution :
Dept. of Phys., Rutgers Univ., Piscataway, NJ, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
Fundamental issues in preparing high-quality high-Tc YBa2Cu3O7-x thin films are addressed. The techniques of inverted cylindrical magneton sputtering and pulsed laser deposition are chosen as successful examples to illustrate how the key problems can be solved. The fabrication of YBa2Cu3 O7-x/PrBa2Cu3O7-x superlattices where superconductivity in a single unit cell layer of YBa 2Cu3O7-x was observed demonstrates the state of the art of thin-film deposition of high-Tc materials. Systematic variations of the deposition parameters result in changes of superconducting and structural properties of the films that correlate with their microwave and infrared characteristics
Keywords :
barium compounds; high-temperature superconductors; praseodymium; sputter deposition; superconducting thin films; superlattices; vapour deposition; yttrium compounds; YBa2Cu3O7-x; YBa2Cu3O7-x-PrBa2Cu 3O7-x superlattices; fabrication; high temperature superconductors; infrared characteristics; inverted cylindrical magneton sputtering; microwave characteristics; preparation; pulsed laser deposition; structural properties; thin film; High temperature superconductors; Optical device fabrication; Optical pulses; Pulsed laser deposition; Sputtering; Superconducting films; Superconducting magnets; Superconducting thin films; Superconductivity; Superlattices;
Journal_Title :
Magnetics, IEEE Transactions on
