CAFE-the MIT computer-aided fabrication environment

The computer-aided fabrication environment (CAFE) is a software system being developed at the Massachusetts Institute of Technology (MIT) for use in the manufacture of integrated circuits (ICs). CAFE is intended to be used in all phases of process design, development, planning, and manufacturing of IC wafers. While still under active development, CAFE presently provides day-to-day support to research and production facilities at MIT with both standard and flexible product lines. CAFE provides a platform for work in several active research areas at MIT, including technology (process and device) computer-aided design (TCAD), process modeling, manufacturing quality control, and TCAD tool integration. The overall architecture and characteristics of the CAFE system are described. The significant problems solved and the design decisions made are identified, and some of the most important components of the CAFE system as it currently exists are discussed. The CAFE architectural framework supports a wide variety of software modules, including both development tools and on-line applications. The key components of the CAFE architecture are the data model and data base schema, the process flow and wafer representations, the user interface, and the application programming and database interfaces