DocumentCode

1102951

Title

IIB-5 ultrashallow p⁺-n junctions suitable for VLSI CMOS

Author

Sigmon, T.W.

Volume

32

Issue

11

fYear

1985

fDate

11/1/1985 12:00:00 AM

Firstpage

2532

Lastpage

2533

Keywords

Boron; Fabrication; Gas lasers; Implants; Ion implantation; Resists; Surface cleaning; Tail; Thermal resistance; Very large scale integration;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1985.22319

Filename

1485065