Title :
In-situ formation of BSCCO thin films by plasma assisted thermal evaporation
Author :
Silver, R.M. ; Ogawa, E.T. ; Pan, S. ; de Lozanne, A.L.
Author_Institution :
Dept. of Phys., Texas Univ., Austin, TX, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
Thin films of the superconductor Bi-Sr-Ca-Cu-O (BSCCO) have been prepared by thermal evaporation in an evaporator featuring an RF-excited oxygen plasma generator. Formation of the 2212 phase is obtained in situ, as confirmed by X-ray analysis. The films require postannealing, however, in order to exhibit a superconducting transition. Specifically, postanneals are required to obtain critical temperatures of up to 75 K; 1330 Pa is the minimum annealing pressure. The authors report the study of the superconducting properties as a function of oxygen annealing pressure as well as a characterization of the oxygen plasma. An investigation of the surface morphology was performed using a force microscopy (AFM) and a tunneling microscopy (STM). The latter clearly shows terraces and steps with a height of 1.5 nm, or multiples thereof, corresponding to one-half of the c-axis lattice constant of the 2212 compound. The AFM, on the other hand, shows a drastic difference between as-grown and annealed films, even when the former are sometimes insulating
Keywords :
X-ray diffraction examination of materials; annealing; atomic force microscopy; bismuth compounds; calcium compounds; crystal morphology; high-temperature superconductors; plasma deposition; scanning tunnelling microscopy; strontium compounds; superconducting thin films; superconducting transition temperature; surface structure; 1330 Pa; 2212 phase; 75 K; AFM; BSCCO thin films; Bi-Sr-Ca-Cu-O; RF-excited oxygen plasma generator; STM; X-ray analysis; critical temperatures; force microscopy; high temperature superconductors; plasma assisted thermal evaporation; postannealing; steps; superconducting transition; surface morphology; terraces; tunneling microscopy; Annealing; Atomic force microscopy; Bismuth compounds; Plasma properties; Plasma temperature; Plasma x-ray sources; Superconducting films; Superconducting thin films; Surface morphology; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on