Title :
The `in-situ´ preparation and properties of Y-Ba-Cu-O thin films on the SrTiO3, Al2O3 and Si substrates
Author :
Faley, M.I. ; Gershenson, M.E. ; Kuchta, N.P. ; Salun, V.S.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, USSR
fDate :
3/1/1991 12:00:00 AM
Abstract :
YBa2Cu3Ox thin (d=0.1-1 μm) films were prepared in situ on single-crystal SrTiO3 (100), sapphire, and Si heated substrates by RF magnetron sputtering from sintered targets. The spatial distribution of the film contents in the substrate holder plane was measured. Films with stoichiometric composition and mirrorlike surfaces were fabricated. High critical parameters of the films were achieved. Crystal structure, resistivity, and critical current were studied along with the film surface degradation because of the storage in air. The proximity tunnel structure YBCO/Ag/Al/Al-oxide/AI was fabricated, and the gap structure was observed up to Tc of the YBCO film
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; proximity effect; sputtered coatings; superconducting thin films; superconducting transition temperature; yttrium compounds; Al2O3; RF magnetron sputtering; Si; SrTiO3; YBa2Cu3Ox; YBaCuO-Ag-Al-AlOx-Al; critical current; critical parameters; gap structure; high temperature superconductor; mirrorlike surfaces; proximity tunnel structure; resistivity; sintered targets; spatial distribution; stoichiometric composition; structure; thin films; Artificial intelligence; Conductivity; Critical current; Degradation; Radio frequency; Semiconductor films; Sputtering; Substrates; Transistors; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
