Title :
Production technology for high-yield, high-performance GaAs monolithic amplifiers
Author :
Wang, Shing-Kuo ; Chang, Ching-Der ; Siracusa, Mario ; Liu, Louis C T ; Pauley, Robert G. ; Asher, Peter ; Sokolich, Marko
Author_Institution :
Hughes Aircraft Company, Torrance, CA
fDate :
12/1/1985 12:00:00 AM
Abstract :
A production technology for GaAs MMIC\´s has been developed. In a six-month period, seventy 2-in wafers have been processed for

-band monolithic power and low-noise amplifiers and more than 2000 working chips have been produced. The two-stage power amplifiers have achieved a typical performance of 1.6-w output power with 8-dB associated gain and 20-percent power-added efficiency at 9.5 GHz. The two-stage low-noise amplifiers have consistently achieved 3-dB noise figure with 20-dB associated gain at the same frequency. Improvement of MMIC processing technology implemented in this work has resulted in-an average de chip yield of 15 percent.
Keywords :
Capacitors; Circuit synthesis; Gallium arsenide; Low-noise amplifiers; Microwave FETs; Microwave devices; Millimeter wave integrated circuits; Power amplifiers; Power generation; Production;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1985.22414