Title :
ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis
Author :
Di Palma, Federico ; De Nicolao, Giuseppe ; Miraglia, Guido ; Donzelli, Oliver M.
Author_Institution :
Univ. of Pavia, Pavia
Abstract :
Early detection of faulty process steps through process diagnosis is critical to the semiconductor industry. The AC-ID methodology can isolate the root causes of yield loss by combining end-of-line tests with process history information. The ACID software tool automates this methodology and is fully operational at several industry production sites.
Keywords :
circuit testing; electron device manufacture; fault diagnosis; interactive systems; pattern classification; ACID software tool; automatic sort-map classification; end-of-line tests; faulty process detection; interactive process diagnosis; process history information; semiconductor industry; Data analysis; Electronics industry; Fault detection; Fault diagnosis; History; Information analysis; Manufacturing processes; Production; Semiconductor device manufacture; Time series analysis; AC/ID methodology; commonality analysis; electrical sort test; fault diagnosis; pattern recognition; semiconductor manufacturing; statistical methods;
Journal_Title :
Design & Test of Computers, IEEE
DOI :
10.1109/MDT.2007.119
