DocumentCode
1104825
Title
Analysis of surface-induced degradation of GaAs power MESFET´s
Author
Dumas, J.M. ; Lecrosnier, D. ; Bresse, J.F.
Author_Institution
Centre National d´´Etudes des Telecommunications, Lannion, France
Volume
6
Issue
4
fYear
1985
fDate
4/1/1985 12:00:00 AM
Firstpage
192
Lastpage
194
Abstract
Long-term degradation of GaAs power MESFET´s is shown to be surface induced. Using micro-Auger analysis (beam spot size ≃0.1-0.2 µm), we have identified a gallium outdiffusion induced by the SiO2 surface protection deposition and a GaAs oxidation mechanism during electrical operation. These reactions modify the electrical surface properties in the access regions explaining the RF and dc performances degradation.
Keywords
Aging; Current measurement; Degradation; Gain measurement; Gallium arsenide; Life testing; MESFETs; Manufacturing; Power measurement; Radiofrequency identification;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1985.26093
Filename
1485246
Link To Document