Title :
High-Performance Control of Piezoelectric Tube Scanners
Author :
Bhikkaji, B. ; Ratnam, M.. ; Fleming, Andrew J. ; Moheimani, S. O Reza
Author_Institution :
Univ. of Newcastle
Abstract :
In this paper, a piezoelectric tube of the type typically used in scanning tunneling microscopes (STMs) and atomic force microscopes (AFMs) is considered. Actuation of this piezoelectric tube is hampered by the presence of a lightly damped low-frequency resonant mode. The resonant mode is identified and damped using a positive velocity and position feedback (PVPF) controller, a control technique proposed in this paper. Input signals are then shaped such that the closed-loop system tracks a raster pattern. Normally, piezoelectric tubes are actuated using voltage amplifiers. Nonlinearity in the form of hysteresis is observed when actuating the piezoelectric tubes at high amplitudes using voltage amplifiers. It has been known for some time that hysteresis in piezoelectric actuators can be largely compensated by actuating them using charge amplifiers. In this paper, high-amplitude actuation of a piezoelectric tube is achieved using a charge amplifier.
Keywords :
amplifiers; atomic force microscopy; closed loop systems; control nonlinearities; feedback; piezoelectric actuators; scanning tunnelling microscopy; velocity control; atomic force microscopes; charge amplifier; closed-loop system; damping; high-performance control; hysteresis; nonlinearity; piezoelectric actuator; piezoelectric tube scanner; position feedback controller; positive velocity controller; resonant mode; scanning tunneling microscopes; voltage amplifier; Atomic force microscopy; Control systems; Feedback; Hysteresis; Probes; Resonance; Robust control; Surface topography; Tunneling; Vibration control; Charge amplifiers; damping; feedback control; hysteresis; piezoelectric tube; raster pattern; resonant mode; system identification;
Journal_Title :
Control Systems Technology, IEEE Transactions on
DOI :
10.1109/TCST.2007.902947