• DocumentCode
    1105360
  • Title

    Visible-laser repair of clear defects in photomasks

  • Author

    Oprysko, M.M. ; Beranek, M.W. ; Young, P.L.

  • Author_Institution
    Gould Research Center, Rolling Meadows, IL
  • Volume
    6
  • Issue
    7
  • fYear
    1985
  • fDate
    7/1/1985 12:00:00 AM
  • Firstpage
    344
  • Lastpage
    346
  • Abstract
    A method for repairing clear defects in photomasks is demonstrated. A visible (514.5-nm) laser beam focused on a defect area drives a pyrolytic reaction which leaves a metal film on the defect area. Defects as small as 1.6 µm have been successfully repaired. Using currently available laser trimming systems, submicrometer repair resolution can be achieved.
  • Keywords
    Argon; Gas lasers; Laser beams; Laser modes; Laser theory; Optical films; Optical surface waves; Power lasers; Pulsed laser deposition; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1985.26149
  • Filename
    1485302
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1105360