The n-channel LDD MOSFET lifetime is observed to follow

from 77 to 295 K when the device is stressed near the maximum I
sub. Here I
dis the drain current and

is the proportionality constant. The experimental result indicates that

is approximately 2.7 and is independent of temperature. However, the proportionality constant

follows

, with

meV. The smaller proportionality constant at low temperatures suggests that hot-electron injection (HEI) degradation is caused by the electron trapping in the oxide.