DocumentCode
1106172
Title
An isolated MISS regenerative switching device
Author
Chang, C.Y. ; Tzeng, F.C. ; Chen, C.T. ; Wang, S.J. ; Wang, Y.D.
Author_Institution
National Cheng Kung University, Tainan, Taiwan
Volume
6
Issue
10
fYear
1985
fDate
10/1/1985 12:00:00 AM
Firstpage
545
Lastpage
547
Abstract
A new MISS switching device structure was designed and fabricated, which consists of Al/thin thermal oxide/p-n+-p-Si layers and is isolated by diffusing n-well to the buried n+layer. Furthermore, an N+-shield layer which confines the carrier flow to the MIS interface and a p+-gate which injects carriers in the n+-p junction were successfully implemented. The device reveals that switching and holding voltages Vs and VH both decrease with increasing
, and with decreasing
. The fringing effect is minimized due to the isolated structure.
, and with decreasing
. The fringing effect is minimized due to the isolated structure.Keywords
Charge carrier processes; Dielectrics; Electrodes; Fabrication; Helium; Metal-insulator structures; P-n junctions; Temperature; Tunneling; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1985.26224
Filename
1485377
Link To Document