DocumentCode
1106765
Title
Single-mode optical waveguides and phase modulators in the InP material system
Author
Donnelly, J.P. ; Demeo, N.L. ; Leonberger, F.J. ; Groves, S.H. ; Vohl, P. ; O´Donnell, F.J.
Author_Institution
Massachusetts Institute of Technology, Lexington, MA, USA
Volume
21
Issue
8
fYear
1985
fDate
8/1/1985 12:00:00 AM
Firstpage
1147
Lastpage
1151
Abstract
The characteristics of several different single-mode optical waveguides in the InP material system are discussed. Slab-coupled rib waveguides in GaInAsP (
m) epitaxial layers grown on InP have shown propagation losses as low as 1.7 cm-1at 1.3 μm and 2.7 cm-1at 1.15 μm. Oxide-confined InP rib guides fabricated using a lateral overgrowth technique have losses of about 1.5 cm-1at 1.15 μm. Three-guide couplers have been made by fabricating three parallel oxide-confined guides in close proximity. InP p+-n-n+ guides capable of modulating TE-polarized radiation have been fabricated using epitaxial techniques and Be-ion implantation. By measuring the phase difference between the TE-like and TM-like modes as a function of applied voltage, an estimate of the r41 electrooptic coefficient in InP at 1.3 μm that is in good agreement with a previously reported value was obtained. Guides of this type should find use as the active components in InP switches and interferometers.
m) epitaxial layers grown on InP have shown propagation losses as low as 1.7 cm-1at 1.3 μm and 2.7 cm-1at 1.15 μm. Oxide-confined InP rib guides fabricated using a lateral overgrowth technique have losses of about 1.5 cm-1at 1.15 μm. Three-guide couplers have been made by fabricating three parallel oxide-confined guides in close proximity. InP p+-n-n+ guides capable of modulating TE-polarized radiation have been fabricated using epitaxial techniques and Be-ion implantation. By measuring the phase difference between the TE-like and TM-like modes as a function of applied voltage, an estimate of the rKeywords
Indium materials/devices; Optical polarization; Optical strip waveguides; Phase modulation; Couplers; Epitaxial layers; Indium phosphide; Optical interferometry; Optical materials; Optical modulation; Optical waveguides; Phase measurement; Phase modulation; Propagation losses;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1985.1072804
Filename
1072804
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