Title :
On-wafer impedance measurement on lossy substrates
Author :
Williams, Dylan F. ; Marks, Roger B.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fDate :
6/1/1994 12:00:00 AM
Abstract :
This paper introduces a new method for measuring impedance parameters in transmission lines fabricated on lossy or dispersive dielectrics. The method, which uses an independent calibration to provide an impedance reference, compares well with conventional techniques when applied to lossless substrates. The effectiveness of the technique is illustrated for resistors fabricated on lossy silicon substrates.<>
Keywords :
calibration; electric impedance measurement; microwave integrated circuits; microwave measurement; strip line components; Si; Si substrates; dispersive dielectrics; impedance reference; independent calibration; lossy substrates; onwafer impedance measurement; resistors; transmission lines; Calibration; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Dielectric substrates; Dispersion; Impedance measurement; Loss measurement; Propagation losses; Transmission line measurements;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
