Viscous damping model for laterally oscillating microstructures

Author

Cho, Young-Ho ; Pisano, Albert P. ; Howe, Roger T.

Author_Institution

Mech. Eng. Res. Inst., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

Volume

3

Issue

2

fYear

1994

fDate

6/1/1994 12:00:00 AM

Firstpage

81

Lastpage

87

Abstract

Viscous energy loss in oscillating fluid-film dampers that provide frictional shear for laterally-driven planar microstructures is investigated. It is found that Stokes-type fluid motion models viscous damping more accurately than Couette-type flow field. This paper characterizes the damping property of a fluid layer in terms of viscous energy dissipation, then derives analytic damping formulae for practical Q estimation. Theoretical Q-factors are compared to the experimental values, measured from surface-micromachined polysilicon resonators. Data reported by previous investigators are also analyzed and compared. The experimental results indicate that the Stokes-type damping model presents a more general damping treatment with better Q estimation, although discrepancies of 10 to 20% still remain between the estimated and measured Q

Keywords

Q-factor; damping; fluidic devices; micromechanical devices; Q-factors; Stokes-type fluid motion; analytic damping formulae; frictional shear; laterally oscillating microstructures; laterally-driven planar microstructures; oscillating fluid-film dampers; polysilicon resonators; viscous damping model; viscous energy loss; Actuators; Damping; Energy dissipation; Frequency; Mechanical engineering; Mechanical sensors; Microstructure; Q factor; Q measurement; Shock absorbers;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.294325

Filename

294325