DocumentCode :
1110418
Title :
An algorithm to find two-dimensional signals with specified zero crossings
Author :
Sayegh, Soheil I. ; Kok, Yon-Lin ; Hong, Joo-Heng
Author_Institution :
Michigan State University, East Lansing, MI
Volume :
35
Issue :
1
fYear :
1987
fDate :
1/1/1987 12:00:00 AM
Firstpage :
107
Lastpage :
111
Abstract :
We present an iterative method for finding two-dimensional band-limited functions with predetermined zero crossings. This problem arises when we want to generate a prescribed binary image at the output of a diffraction-limited imaging system with high-contract recording. An important application of this image generation problem is in the design of masks for microlithography. After describing the algorithm, a proof of its convergence, based on the properties of nonexpansive mappings, is given. The relevance of this algorithm to the image construction problem is then discussed, and we conclude by illustrating two patterns generated by our proposed method.
Keywords :
Cameras; Convergence; Diffraction; Frequency domain analysis; Helium; Image generation; Iterative algorithms; Iterative methods; Linear programming; Signal processing algorithms;
fLanguage :
English
Journal_Title :
Acoustics, Speech and Signal Processing, IEEE Transactions on
Publisher :
ieee
ISSN :
0096-3518
Type :
jour
DOI :
10.1109/TASSP.1987.1165021
Filename :
1165021
Link To Document :
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