Title :
IIIA-1 a self-aligned emitter-base contact technique for AlGaAs/GaAs heterojunction bipolar transistors
Author :
Morizuka, K. ; Tsuda, Kazuhiko ; Kobayashi, Takehiko ; Azuma, Masaki
fDate :
11/1/1986 12:00:00 AM
Keywords :
Bipolar transistors; Electrodes; Etching; Gallium arsenide; Heterojunction bipolar transistors; Photonic band gap; Propagation delay; Radiative recombination; Resists; Ring oscillators;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22773