DocumentCode

1110734

Title

IIIB-2 The fabrication submicrometer MOSFET´s using laser doping

Author

Bezjian, K. ; Simon, Terry W. ; Magee, T.

Volume

33

Issue

11

fYear

1986

fDate

11/1/1986 12:00:00 AM

Firstpage

1847

Lastpage

1847

Keywords

Boron; Doping; Electron devices; Gas lasers; Implants; Laser beams; MOSFETs; Optical device fabrication; Optical pulses; Silicon;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1986.22782

Filename

1485999