DocumentCode
1110965
Title
IVB-7 the sidewall resistor—A novel test structure to reliably extract specific contact resistivity
Author
Wright, P.J. ; Schreyer, T.A. ; Saraswat, Krishna C. ; Meindl, J.D.
Volume
33
Issue
11
fYear
1986
fDate
11/1/1986 12:00:00 AM
Firstpage
1855
Lastpage
1856
Keywords
Area measurement; Conductivity; Contact resistance; Current measurement; Electrical resistance measurement; Numerical simulation; Proximity effect; Resistors; Testing; Two dimensional displays;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1986.22803
Filename
1486020
Link To Document