Title :
IVB-7 the sidewall resistor—A novel test structure to reliably extract specific contact resistivity
Author :
Wright, P.J. ; Schreyer, T.A. ; Saraswat, Krishna C. ; Meindl, J.D.
fDate :
11/1/1986 12:00:00 AM
Keywords :
Area measurement; Conductivity; Contact resistance; Current measurement; Electrical resistance measurement; Numerical simulation; Proximity effect; Resistors; Testing; Two dimensional displays;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22803
