Title :
IVB-8 CMOS devices in ZMR-Si on quartz substrate
Author :
Tomita, Hiroki ; Kojima, S. ; Usui, S.
fDate :
11/1/1986 12:00:00 AM
Keywords :
Circuits; DH-HEMTs; Etching; Molecular beam epitaxial growth; Nonhomogeneous media; Phased arrays; Semiconductor films; Semiconductor laser arrays; Substrates; Surface emitting lasers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22805
