DocumentCode

1111050

Title

VA-6 sputtered Si masks for GaAs etching and diffusion

Author

Wu, X.S. ; Omura, E. ; Huang, Tzu-Chi ; Coldren, Larry A. ; Merz, J.L.

Volume

33

Issue

11

fYear

1986

fDate

11/1/1986 12:00:00 AM

Firstpage

1858

Lastpage

1858

Keywords

Adhesives; Amorphous materials; Electrons; Gallium arsenide; Semiconductor films; Spontaneous emission; Sputter etching; Temperature; Wet etching; Zinc;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1986.22811

Filename

1486028