DocumentCode :
1111097
Title :
VB-3 noninvasive optical sheet charge density probe for silicon integrated circuits
Author :
Heinrich, H.K. ; Bloom, D.M. ; Hemenway, B.R. ; McGroddy, K. ; Keller, Ulrich
Volume :
33
Issue :
11
fYear :
1986
fDate :
11/1/1986 12:00:00 AM
Firstpage :
1860
Lastpage :
1860
Keywords :
Circuit testing; Integrated optics; Optical beams; Optical devices; Optical films; Optical interferometry; Optical sensors; Photonic integrated circuits; Probes; Silicon;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1986.22815
Filename :
1486032
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1111097
