Title :
VB-6 a laser-induced ohmic link for wafer-scale integration in standard CMOS processing
Author :
Chapman, Glenn H. ; Mathur, B. ; Raffel, J.I.
fDate :
11/1/1986 12:00:00 AM
Keywords :
Aluminum; CMOS process; Diodes; Electrons; Equations; Laser beams; Optical pulses; Space vector pulse width modulation; Testing; Wafer scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1986.22818
