Highly Integrable Pressurized Microvalve for Portable SU-8 Microfluidic Platforms

In this paper, a highly integrable pressurized thermo-pneumatic microvalve for impulsion and handling of fluids in portable SU-8 microfluidic platforms is reported. The microvalve aims to overcome the dependence on external pressure sources for actuation in this kind of platforms by incorporating a pressurized chamber in the design. The microvalve consists of two modules. The first one is a pressurized SU-8 chamber which makes the microvalve portable and is used to store pneumatic energy, and the second one is a gold wire inserted in a thin SU-8 wall to make a thermo-pneumatic and single-use actuation. The gold wire heats the thin wall up, and the pneumatic energy stored in the chamber exerts pressure on the wall simultaneously. The wall breaks due to the combination of these effects, releasing the pressure stored in the chamber, and creating an unidirectional flow in an output channel. The microvalve has been fabricated and tested in the laboratory showing an activation time of 1 s and a required energy of 188 mJ, values which fit the theoretical model. The advantages of this microvalve as a microfluidic component lie in its independence of external pressure sources, its high integrability with electronics and microfluidics in the same substrate [printed circuit board(PCB)], and the low consumption with respect to other PCB/SU-8 microvalves.