Simulation of hot-carrier induced MOS circuit degradation for VLSI reliability analysis

A new integrated simulation tool is presented for estimating the hot-carrier induced degradation of nMOS transistor characteristics and circuit performance. This reliability simulation tool incorporates: (1) an accurate 1-dimensional MOSFET model for representing the electrical behavior of locally damaged transistors; and (2) physical models for both fundamental device-degradation mechanisms (charge trapping and interface trap generation). Hot-carrier induced oxide damage can be specified by only a few parameters, avoiding extensive parameter extractions for the characterization of device damage. A repetitive simulation scheme ensures accurate prediction of the circuit-level degradation process under dynamic operating conditions. The evolution of hot-carrier related damage in each device is automatically simulated at predetermined time intervals, instead of extrapolating the long-term degradation using only the initial simulation results. Thus, the gradual variation of dynamic stress conditions is accounted for during the long-term damage estimates