DocumentCode
1111512
Title
A Microfluidic Packaging Technique for Lab-on-Chip Applications
Author
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad ; Therriault, Daniel
Author_Institution
Dept. of Electr. Eng., Ecole Polytech. de Montreal, Montreal, QC
Volume
32
Issue
2
fYear
2009
fDate
5/1/2009 12:00:00 AM
Firstpage
410
Lastpage
416
Abstract
In this paper, we address the often-neglected challenges of microfluidic packaging for biochemical sensors by proposing an efficient direct-write microfluidic packaging procedure. This low-cost procedure is performed through a programmable dispensing system right after a routine electronic packaging process. In order to prove the concept, the simulation, fabrication and chemical testing results of implemented hybrid system incorporating microelectronics and microfluidics are also presented and discussed.
Keywords
bioMEMS; biochemistry; biosensors; chemical sensors; electronics packaging; lab-on-a-chip; microfluidics; microsensors; biochemical sensor; electronic packaging process; lab-on-chip application; microfluidic packaging technique; programmable dispensing system; Complementary metal–oxide–semiconductor (CMOS); direct-write fabrication process; integrated capacitive sensor; lab-on-chip; microfluidic packaging;
fLanguage
English
Journal_Title
Advanced Packaging, IEEE Transactions on
Publisher
ieee
ISSN
1521-3323
Type
jour
DOI
10.1109/TADVP.2008.920655
Filename
4476160
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