(Al,Ga)As/GaAs heterojunction transistors (HBT\´s) grown on Si substrates have been characterized at microwave frequencies and have been found to perform extremely well. For emitter dimensions of 4 × 20 µm
2, current gain cutoff frequencies

GHz and maximum oscillation frequencies

of 11.5 GHz have been obtained in a mesa-type structure. These values compare very well with the

GHz and

GHz which are the highest reported for HBT\´s on GaAs substrates in a nonmesa structure with an emitter width of ∼ 1.5 µm. These results clearly demonstrate the potential of HBT\´s in general at microwave frequencies, as well as the viability of GaAs on Si technology.