Title :
Interferometric characterization of nonflat transmission diffraction gratings
Author :
Sumetsky, M. ; White, T.P. ; Dyson, H.M. ; Westbrook, P.S. ; Eggleton, B.J.
Author_Institution :
OFS Labs., Murray Hill, NJ, USA
Abstract :
We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings on substrates with nonflat surfaces. Our method measures the interferometric pattern between the coherent zeroth-order and first-order transmission beams and allows simultaneous characterization of both the grating period variation and the substrate thickness variation.
Keywords :
diffraction gratings; light interferometry; surface topography measurement; thickness measurement; coherent zeroth-order transmission beams; first-order transmission beams; grating period variation; nonflat transmission diffraction gratings; side-diffraction interferometric characterization; substrate thickness variation; Chirp; Diffraction gratings; Fiber gratings; Interference; Optical fiber devices; Optical fibers; Optical interferometry; Optical surface waves; Thermomechanical processes; Thickness measurement;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.833873
