• DocumentCode
    1112563
  • Title

    Recombination lifetime in oxygen-precipitated silicon

  • Author

    Hwang, J.M. ; Schroder, Dieter K. ; Goodman, A.M.

  • Author_Institution
    Westinghouse R&D Center, Pittsburgh, PA
  • Volume
    7
  • Issue
    3
  • fYear
    1986
  • fDate
    3/1/1986 12:00:00 AM
  • Firstpage
    172
  • Lastpage
    174
  • Abstract
    The recombination lifetime degrades when interstitial oxygen precipitates in Czochralski-grown silicon. We have observed a more severe degradation in p-type than in n-type material. Based on recombination lifetime, deep-level transient spectroscopy, Fourier-transform infra-red transmission, and transmission electron microscopy measurements, we attribute the degradation mainly to interface states at the precipitate-silicon interface acting as recombination centers. Positive charge in the oxygen precipitates (OP´s), causing an electron-attractive space-charge region (scr) around the precipitate in p-Si and a hole-repulsive accumulation layer in n-Si, is proposed to explain the lifetime differences between n-type and p-type silicon.
  • Keywords
    Annealing; Degradation; Energy states; Interface states; Shape; Silicon; Solid state circuits; Spectroscopy; Spontaneous emission; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1986.26334
  • Filename
    1486157