A vertical Kelvin test structure for measuring the true pecific contact resistivity

A vertical Kelvin test structure, which can be used to measure the true specific contact resistivity of a metallization system, is proposed and studied. For this test structure, the driving current flows "vertically," thus the sheet resistance and current crowding effects are eliminated and measurement on the true specific contact resistivity becomes possible. Experimental works show that this test structure gives a more linear relation between resistance and contact area than the conventional six-terminal test structure.