Title :
Accuracy of effective channel-length extraction using the capacitance method
Author :
Yao, C.T. ; Mack, Ingham A. ; Lin, Hung C.
Author_Institution :
Sachs/Freeman Associates, Landover, MD
fDate :
4/1/1986 12:00:00 AM
Abstract :
A comparison of two different methods for measuring the effective channel length of a MOSFET has been made. It has been determined the effective channel length obtained by the direct capacitance method depends on doping concentration and concentration gradient of the source-drain junctions. Due to the inner fringing capacitance and turn-on of the source-drain regions, the capacitance method tends to predict a longer effective channel length as compared to the resistance method.
Keywords :
Calibration; Capacitance measurement; Electrical resistance measurement; Frequency conversion; Laboratories; Length measurement; Linear regression; MOSFET circuits; Testing; Threshold voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1986.26368
