DocumentCode
1113111
Title
Enhancement- and depletion-mode p-channel Gex Si1-x modulation-doped FET´s
Author
Pearsall, T.P. ; Bean, John C.
Author_Institution
AT&T Bell Laboratories, Murray Hill, NJ
Volume
7
Issue
5
fYear
1986
fDate
5/1/1986 12:00:00 AM
Firstpage
308
Lastpage
310
Abstract
We report enhancement- and depletion-mode p-channel modulation-doped field-effect transistors (FET´s) in Si. Si/Gex Si1-x heterostructures were grown by molecular-beam epitaxy (MBE) with one-dimensional confinement of holes at the heterostructure interfaces. Transconductances of 2.5 and 3.2 mS/mm were measured at 300 K for enhancement- and depletion-mode devices, respectively, in good agreement with transistor modeling predictions for p-channel devices using measured material parameters.
Keywords
Charge measurement; Current measurement; Electrical resistance measurement; Energy states; Epitaxial layers; Etching; FETs; Structural engineering; Threshold voltage; Transconductance;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1986.26383
Filename
1486206
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