DocumentCode
1113764
Title
Interface roughness scattering in normal and inverted In0.53 Ga0.47 As—In0.52 Al0.48 As modulation-doped heterostructures
Author
Hong, Won-Pyo ; Singh, Jasprit ; Bhattacharya, Pallab K.
Author_Institution
The University of Michigan, Ann Arbor, MI
Volume
7
Issue
8
fYear
1986
fDate
8/1/1986 12:00:00 AM
Firstpage
480
Lastpage
482
Abstract
A new model for interface roughness scattering in modulation-doped (MD) heterostructures, based on the physical structure of a molecular beam epitaxy- (MBE) grown heterointerface, is formulated. The parameters describing interface roughness have been derived from growth studies and analysis of photoluminescence linewidths of quantum wells. The model has been applied to analyze low-temperature electron mobilities in normal and inverted In0.53 Ga0.47 As-In0.52 Al0.48 As MD heterostructures. It is found that the mobility in the normal heterostructure is limited by alloy scattering, whereas both alloy and interface roughness scattering play equally dominant roles in the inverted structure.
Keywords
Atomic layer deposition; Crystalline materials; Electron mobility; Epitaxial layers; FETs; Molecular beam epitaxial growth; Particle scattering; Photoluminescence; Semiconductor process modeling; Two dimensional displays;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1986.26446
Filename
1486269
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