• DocumentCode
    1113764
  • Title

    Interface roughness scattering in normal and inverted In0.53Ga0.47As—In0.52Al0.48As modulation-doped heterostructures

  • Author

    Hong, Won-Pyo ; Singh, Jasprit ; Bhattacharya, Pallab K.

  • Author_Institution
    The University of Michigan, Ann Arbor, MI
  • Volume
    7
  • Issue
    8
  • fYear
    1986
  • fDate
    8/1/1986 12:00:00 AM
  • Firstpage
    480
  • Lastpage
    482
  • Abstract
    A new model for interface roughness scattering in modulation-doped (MD) heterostructures, based on the physical structure of a molecular beam epitaxy- (MBE) grown heterointerface, is formulated. The parameters describing interface roughness have been derived from growth studies and analysis of photoluminescence linewidths of quantum wells. The model has been applied to analyze low-temperature electron mobilities in normal and inverted In0.53Ga0.47As-In0.52Al0.48As MD heterostructures. It is found that the mobility in the normal heterostructure is limited by alloy scattering, whereas both alloy and interface roughness scattering play equally dominant roles in the inverted structure.
  • Keywords
    Atomic layer deposition; Crystalline materials; Electron mobility; Epitaxial layers; FETs; Molecular beam epitaxial growth; Particle scattering; Photoluminescence; Semiconductor process modeling; Two dimensional displays;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1986.26446
  • Filename
    1486269