DocumentCode
1114129
Title
The refractive index measurements of RF magnetron sputtered ZnO thin film on sapphire
Author
Wu, Mu-Shiang ; Shiosaki, Tadashi ; Kawabata, Akira
Author_Institution
Tatung Institute of Technology, Taipei, Taiwan
Volume
23
Issue
7
fYear
1987
fDate
7/1/1987 12:00:00 AM
Firstpage
1105
Lastpage
1107
Abstract
Measurements were made of the refractive index of an RF magnetron sputtered ZnO thin film on sapphire. We compare the experimental results to theory when TE and TM guided waves propagate in the plane at an arbitrary angle with respect to the 
axis when the axis lies in the plane of the film. Care also should be taken when one uses 
-line spectroscopy to determine the refractive index of a film.
axis when the axis lies in the plane of the film. Care also should be taken when one uses -line spectroscopy to determine the refractive index of a film.Keywords
Epitaxial growth; Optical planar waveguides; Optical refraction; Planar optical waveguide; Optical devices; Optical films; Optical refraction; Optical waveguides; Radio frequency; Refractive index; Sputtering; Substrates; Tellurium; Zinc oxide;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1987.1073471
Filename
1073471
Link To Document