Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator

Author

Gel, Murat ; Ishida, Tadashi ; Akasaka, Tetsuo ; Umeno, Akinori ; Araki, Koji ; Hirakawa, Kaz ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo

Volume

16

Issue

1

fYear

2007

Firstpage

1

Lastpage

6

Abstract

We report fabrication and characterization of a mechanically controlled quantum point contact with on-chip electrostatic actuators. Two metallic tips separated with a nano gap are integrated with a micro mechanism, which can be actuated by applied voltage. The electrostatic actuation of the micro mechanism allows the control of separation gap at nanometer level. The gap variation at nanometer level is calibrated with the devices operated in transmission electron microscope. Furthermore, performance of the device is demonstrated by measuring conductance quantization while separating the tips in contact as well as electrical measurements by using tips coated with self assembled monolayers (1-4 benzene dithiol) and conjugated Ru complex

Keywords

electrostatic actuators; monolayers; organic compounds; quantum point contacts; transmission electron microscopes; 1-4 benzene dithiol; conjugated Ru complex; electrical measurements; in-situ transmission electron microscope; mechanically controlled quantum contact; nanogap; on-chip MEMS actuator; on-chip electrostatic actuators; self assembled monolayers; Electric variables measurement; Electrostatic actuators; Electrostatic measurements; Fabrication; Micromechanical devices; Nanoscale devices; Quantization; Quantum mechanics; Transmission electron microscopy; Voltage; in-situ transmission electron microscope (TEM) actuation; Electrostatic actuator; nano gap; quantum contact;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.885852

Filename

4099366