Viscosity response of shear horizontal surface acoustic wave on AlN=sapphire structure

The effect of viscous liquid loading on SH-SAW devices on AlN/sapphire structure has been experimentally investigated. The sensitivity of the devices to liquid (glycerol/water mixtures) viscosity changes is measured to be approximate 8.2 times 10^-9 m² s/kg, which is only about 30% of that of commonly used quartz Love wave devices. This indicates that, when used for mass sensing in liquid the AlN SH-SAW devices have better tolerance to viscous perturbation.