DocumentCode
1115466
Title
On the threshold Voltage of symmetrical DG MOS capacitor with intrinsic silicon body
Author
Wong, Man ; Shi, Xuejie
Author_Institution
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., China
Volume
51
Issue
10
fYear
2004
Firstpage
1600
Lastpage
1604
Abstract
An analytical expression explicitly relating the potential and the electric field at the oxide-semiconductor interface of a symmetrical double-gate oxide-intrinsic semiconductor-oxide system is derived. The expression is continuously applicable to all regimes of operation. The "turn-on" behavior of the system is studied and an "extrapolated" threshold voltage is uniquely defined. Opposite to the behavior of a conventional bulk metal-oxide-semiconductor capacitor realized on a doped substrate, this threshold voltage is shown to decrease with increasing oxide thickness.
Keywords
MOS capacitors; silicon; Si; analytical solution; doped substrate; electric field; extrapolated threshold voltage; intrinsic silicon body; metal-oxide-semiconductor capacitor; oxide-semiconductor interface; symmetrical DG MOS capacitor; symmetrical double-gate oxide-intrinsic semiconductor-oxide system; turn-on behavior; Electric potential; Equations; FETs; Insulation; MOS capacitors; MOSFET circuits; Potential well; Silicon on insulator technology; Substrates; Threshold voltage; Analytical solution; DG; MOS; capacitor; double-gate; metal–oxide–semiconductor; threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2004.834901
Filename
1337170
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