• DocumentCode
    1115466
  • Title

    On the threshold Voltage of symmetrical DG MOS capacitor with intrinsic silicon body

  • Author

    Wong, Man ; Shi, Xuejie

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., China
  • Volume
    51
  • Issue
    10
  • fYear
    2004
  • Firstpage
    1600
  • Lastpage
    1604
  • Abstract
    An analytical expression explicitly relating the potential and the electric field at the oxide-semiconductor interface of a symmetrical double-gate oxide-intrinsic semiconductor-oxide system is derived. The expression is continuously applicable to all regimes of operation. The "turn-on" behavior of the system is studied and an "extrapolated" threshold voltage is uniquely defined. Opposite to the behavior of a conventional bulk metal-oxide-semiconductor capacitor realized on a doped substrate, this threshold voltage is shown to decrease with increasing oxide thickness.
  • Keywords
    MOS capacitors; silicon; Si; analytical solution; doped substrate; electric field; extrapolated threshold voltage; intrinsic silicon body; metal-oxide-semiconductor capacitor; oxide-semiconductor interface; symmetrical DG MOS capacitor; symmetrical double-gate oxide-intrinsic semiconductor-oxide system; turn-on behavior; Electric potential; Equations; FETs; Insulation; MOS capacitors; MOSFET circuits; Potential well; Silicon on insulator technology; Substrates; Threshold voltage; Analytical solution; DG; MOS; capacitor; double-gate; metal–oxide–semiconductor; threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2004.834901
  • Filename
    1337170